Calibration Method and Measurement Uncertainty Evaluation of Indication Error of Digital Pattern Area Measuring Instrument Based on Square

Abstract

Propose a method for calibrating the indication error of a digital pattern area measuring instrument based on the square in length measuring instrument with optical principle. Establish a measurement uncertainty evaluation model based on calibration methods and analyze the sources of uncertainty. Combining with measurement examples, this paper elaborates on the measurement uncertainty evaluation process of the indication error of the digital pattern area measuring instrument based on the square.